13 Device Applications

For significant issues of impurity doping and surface/interface control on device technology of various materials form conventional Si to new layered materials, process technologies based on visual understanding of atomic scale structures will be developed by utilizing the innovative analysis techniques in the “3D Active-Site Science”.


[TARGET 1] Detection of active-sites in semiconductor devices

Three dimensional atomic sites of doped impurities are detected correlated with their electrical activation, and atomic level structures and defects at surface/interface are visually revealed, on the semiconductor materials and their device structures.

[TARGET 2] Clarification of relations between 3D atomic structures of active-sites and device characteristics

Situations of active-sites in semiconductor materials and device structures are revealed by combination of analysis techniques in the “3D Active-Site Science”, and correlated to electrical characteristics of the devices.

[TARGET 3] Creation of new process technologies and verification on devices

Control of situation of the active-sites through process techniques is investigated, and advantages of the high functional active-sites are demonstrated on devices, to develop practical industrial applications.


Members
Principal Investigator

 
 
Kazuo TSUTSUI

Professor, Department of Electronics and Applied Physics, Tokyo Institute of Technology
     
Co-investigator
 

Hitoshi WAKABAYASHI

Professor, Department of Electronics and Applied Physics, Tokyo Institute of Technology
 
Kuniyuki KAKUSHIMA

Associate Professor, Department of Electronics and Applied Physics, Tokyo Institute of Technology
 

Sakura TAKEDA

Assistant Professor, Graduate School of Material Science, Nara Institute of Science and Technology
     
Collaborator

 

Shintaro SATO

Chief Researcher, Fujitsu Laboratory

 

Hiroshi IWAI

Professor Emeritus, Graduate School of Science and Engineering, Tokyo Institute of Technology
     
   
Cooperator

 


Tomoaki KAWAMURA

Yokohama Technology Center, Nishia Cooperation



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